1. Contact module progress and challenges in advanced CMOS technologies;Breil,2021
2. Challenges and limitations of CMOS scaling for FinFET and beyond architectures;Razavieh;IEEE Trans. Nanotechnol.,2019
3. Achieving junction stability in heavily doped epitaxial Si:P;Tsai;Mater. Sci. Semicond. Process.,2021
4. International Roadmap for Devices and Systems,2022
5. Method for depinning the Fermi level of a semiconductor at an electrical junction and devices incorporating such junctions;Grupp;USA Patent,2002