Effects of PECVD preparation conditions and microstructures of boron-doped polysilicon films on surface passivation of p-type tunnel oxide passivated contacts-Reference-Cited by-同舟云学术

Effects of PECVD preparation conditions and microstructures of boron-doped polysilicon films on surface passivation of p-type tunnel oxide passivated contacts

Published:2022-11 Issue: Volume:150 Page:106966
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Zeng Yuheng,Ma Dian,Liu Zunke,Liao Mingdun,Xiao Mingjing,Xing Haiyang,Lin Na,Ding Zetao,Cheng Hao,Wang Yude,Liu Wei,Yan Baojie,Ye Jichun

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference38 articles.

1. Laser contact openings for local poly-Si-metal contacts enabling 26.1%-efficient POLO-IBC solar cells

2. Separating the two polarities of the POLO contacts of an 26.1%-efficient IBC solar cell

3. Design rules for high-efficiency both-sides-contacted silicon solar cells with balanced charge carrier transport and recombination losses

4. n-Type Si solar cells with passivating electron contact: Identifying sources for efficiency limitations by wafer thickness and resistivity variation

5. Contact Selectivity and Efficiency in Crystalline Silicon Photovoltaics

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1. Ultrafast laser-annealing of hydrogenated amorphous silicon in tunnel oxide passivated contacts for high-efficiency n-type silicon solar cells;Materials Today Energy;2024-06

2. Passivating Contacts for Crystalline Silicon Solar Cells: An Overview of the Current Advances and Future Perspectives;Advanced Energy Materials;2024-04

3. Plasma treatment for chemical SiOx enables excellent passivation of p-type polysilicon passivating contact featuring the lowest J of ∼6 fA/cm2;Solar Energy Materials and Solar Cells;2023-08

4. Excellent surface passivation of p-type TOPCon enabled by ozone-gas oxidation with a single-sided saturation current density of ∼ 4.5 fA/cm2;Solar Energy;2023-07