On the quality of hydrogenated amorphous silicon deposited by sputtering
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference27 articles.
1. Process Analysis and Optimization on PECVD Amorphous Silicon on Glass Substrate
2. Nano-crystalline Si1−xCx:H thin films deposited by PECVD for SiC-on-insulator application
3. Anomalously high thermal conductivity of amorphous Si deposited by hot-wire chemical vapor deposition
4. Substantial Crystalline Topology in Amorphous Silicon
5. Optimisation of the hydrogen content in a-Si:H deposited at high rate by dc magnetron sputtering
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1. Roles of hydrogen in structural stability and electronic property of bulk hydrogenated amorphous silicon;Computational Materials Science;2023-01
2. Thermally Reflowed Die-Attached Linear Variable Optical Filter for Mid-Infrared Volatile Organic Compounds Detection;Journal of Microelectromechanical Systems;2019-10
3. Critical investigation on Cu-O bonding configuration variation in copper-oxide thin films for low-cost solar cell applications;Materials Science in Semiconductor Processing;2019-06
4. Hydrogen-induced mechanical properties of amorphous silicon thin films;Materials Science in Semiconductor Processing;2015-10
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