Author:
Shen Hong,Arrale A.M,Dai Peter,Tiku Shiban,Ramanathan Ravi
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
1 articles.
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1. Implanted and irradiated SiO[sub 2]∕Si structure electrical properties at the nanoscale;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009