1. 450 mm silicon wafers challenges –wafer thickness scaling;Goldstein;ECS Trans.,2008
2. 40 years of progress with an extraordinary future;Meyer;Electrochem. Soc. Proc.,2005
3. Chemical reaction engineering in the semiconductor industry;Eversteyn;Philips Res. Rep.,1974
4. Semiconductor Silicon Crystal Technology;Shimura,1989
5. Silicon Epitaxy, Semiconductor and Semimetals;Crippa,2001