Low-temperature deposition of β-Ga2O3 thin films employing in situ pulsed laser-assisted RF sputtering system
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Published:2024-08
Issue:
Volume:179
Page:108428
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Huh Yoon-YoungORCID,
Jo Chang-Hyeon,
Ichimura Masaya,
Koh Jung-Hyuk