Vertical SiGe-based silicon-on-nothing (SON) technology for sub-30nm MOS devices-Reference-Cited by-同舟云学术

Vertical SiGe-based silicon-on-nothing (SON) technology for sub-30nm MOS devices

Published:2005-02 Issue:1-3 Volume:8 Page:51-57
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Thompson Phillip E.,Jernigan Glenn,Schulze Joerg,Eisele Ignaz,Suligoj Tomislav

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference11 articles.

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