Sol–gel MgO thin films for insulation on SiC-Reference-Cited by-同舟云学术

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Sol–gel MgO thin films for insulation on SiC

Published:2004-01 Issue:4-6 Volume:7 Page:249-252
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Bondoux Céline,Prené Philippe,Belleville Philippe,Guillet François,Lambert Sébastien,Minot Benoît,Jérisian Robert

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference12 articles.

1. Status of silicon carbide (SiC) as a wide-bandgap semiconductor for high-temperature applications: A review

2. Park YS. Semiconductor and semimetals. Academic press, vol. 52. 1998.

3. Silica films on silicon carbide: a review of electrical properties and device applications

4. Investigation of aluminum nitride grown by metal–organic chemical-vapor deposition on silicon carbide

5. Insulator investigation on SiC for improved reliability

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