Doping by flash lamp annealing-Reference-Cited by-同舟云学术

Doping by flash lamp annealing

Published:2017-05 Issue: Volume:62 Page:115-127
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Prucnal S.,Rebohle L.,Skorupa W.

Funder

Centrotherm AG

The Daimler Benz AG

The European Community

The FHR GmbH

The IHP Frankfurt/Oder

The Sächsische Aufbaubank

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference118 articles.

1. G.A. Kachurin, E.V. Nidaev, Effectiveness of annealing of implanted layers by millisecond laser pulses, Fiz. Tekh. Poluprovodn. 11, 1977, pp. 2012–2014, or Sov. Phys. Semicond. 11, pp. 1178–1180

2. Historical aspects of subsecond thermal processing;Voelskow,2014

3. Transient enhanced diffusion of B in Si;Jain;J. Appl. Phys.,2002

4. Short time annealing;Sedgwick;J. Electrochem. Soc.,1983

5. Analysis of thermal stresses induced during xenon arc lamp flash annealing;Bentini;J. Appl. Phys.,1983

Cited by 50 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Achieving ultralow contact resistivity in Si via Te hyperdoping and millisecond post-metallization annealing;Acta Materialia;2024-10

2. Enhanced Activation in Phosphorous-Doped Silicon via Dual-Beam Laser Annealing;Materials;2024-08-30

3. Milliseconds Thermal Processing of Boron Hyperdoped Germanium;physica status solidi (a);2024-08-04

4. Wafer-Scale Deep UV Si Photodiodes Based on Ultra-Shallow Junction;IEEE Electron Device Letters;2024-06

5. Crystallization of piezoceramic films on glass via flash lamp annealing;Nature Communications;2024-02-29