Author:
Martens K.,Simoen E.,De Jaeger B.,Meuris M.,Groeseneken G.,Maes H.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference12 articles.
1. De Jaeger B, Bonzom R, Leys F, Meuris M, Heyns M. Optimisation of a thin epitaxial Si layer as Ge passivation layer to demonstrate deep sub-micron n- and p-FETs on Ge-on-insulator substrates. In: Proceedings of the 14th conference on INFOS, 2005. p. 82–5.
2. Croon J, Kaczer B, Groeseneken G, Meuris M. Experimental analysis of a Ge–HfO2–TaN gate stack with a large amount of interface states. In: Proceedings of the ICMTS, 2005. p. 191–6.
3. Martens K, Kaczer B, Roussel P, Maes H, Groeseneken G. Interface trap characterization and Fermi-level pinning in Si-passivated Ge/HfO2 capacitors. In: Proceedings of the ECS fall meeting, 2005, to be published.
4. A new interface state density extraction method applicable to peaked and high-density distributions for Ge MOSFET development;Martens;IEEE Electron Dev Lett,2006
5. Germanium n-type shallow junction activation dependences;Chui;Appl. Phys. Lett.,2005
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