Radiation damage in electron-irradiated strained Si n-MOSFETs

Author:

Takakura K.,Ohyama H.,Hayama K.,Aoki Y.,Eneman G.,Verheyen P.,Simoen E.,Loo R.,Claeys C.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference11 articles.

1. Uchida K, Zednik R, Lu C-H, Jagannathan H, McVittie J, McIntryre PC, et al. IEDM Tech Dig 2004;229.

2. Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors

3. Selective epitaxial deposition of strained silicon: a simple and effective method for fabricating high performance MOSFET devices

4. On the Electrical Activity of Misfit and Threading Dislocations in p-n Junctions Fabricated in Thin Strain-Relaxed Buffer Layers

5. Claeys C, Simoen E, Eneman G. In: Proceedings of the 25th international conference on microelectronics—MIEL 2006, vol. 1. 2006. p. 67.

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Radiation damage in proton-irradiated strained Si n-MOSFETs;Materials Science in Semiconductor Processing;2008-10

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