Author:
Myong Kyong Kyu,Byun Jinuk,Choo Min-ju,Kim Hojoong,Kim Jun Yong,Lim Taeho,Kim Jae Jeong
Funder
National Research Foundation of Korea
MSIT
Samsung Electronics
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference34 articles.
1. Beyond the conventional transistor;Philip Wong;Solid State Electron.,2005
2. Enhanced open innovation: CMP innovation to open new paradigm;Tsujimura;ECS J. Solid State Sci. Technol.,2019
3. Ammonium persulfate and potassium oleate containing silica dispersions for chemical mechanical polishing for cobalt interconnect applications;Ranaweera;ECS J. Solid State Sci. Technol.,2018
4. J.D. Plummer, Silicon VLSI Technology: Fundamentals, Practice and Modeling, Dorling Kindersley2009.
5. S. Babu, Advances in Chemical Mechanical Planarization (CMP), Woodhead Publishing2016.
Cited by
39 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献