Unveiling superior chemical mechanical polishing properties of a novel shell-core structure: Insights from an atomic-scale perspective
-
Published:2024-11
Issue:
Volume:672
Page:160845
-
ISSN:0169-4332
-
Container-title:Applied Surface Science
-
language:en
-
Short-container-title:Applied Surface Science
Author:
Chen ChuandongORCID,
Yue ShuaijunORCID,
Liu Yang,
You HongpengORCID
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献