Accurate determination of two-dimensional thin film thickness in spectroscopic imaging reflectometer using color camera and tunable aperture
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference12 articles.
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5. High speed volumetric thickness profile measurement based on full-field wavelength scanning interferometer;You;Opt. Express,2008
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