Surface defects evaluation system based on electromagnetic model simulation and inverse-recognition calibration method-Reference-Cited by-同舟云学术

Surface defects evaluation system based on electromagnetic model simulation and inverse-recognition calibration method

Published:2017-05 Issue: Volume:390 Page:88-98
ISSN:0030-4018
Container-title:Optics Communications
language:en
Short-container-title:Optics Communications

Author:

Yang Yongying,Chai Huiting,Li Chen,Zhang Yihui,Wu Fan,Bai Jian,Shen Yibing

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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