Fabrication of high-efficiency multilayer-coated gratings for the EUV regime using e-beam patterned substrates-Reference-Cited by-同舟云学术

Fabrication of high-efficiency multilayer-coated gratings for the EUV regime using e-beam patterned substrates

Published:2004-01 Issue:1-6 Volume:229 Page:109-116
ISSN:0030-4018
Container-title:Optics Communications
language:en
Short-container-title:Optics Communications

Author:

Naulleau Patrick P,Liddle J.Alexander,Anderson Erik H,Gullikson Eric M,Mirkarimi Paul,Salmassi Farhad,Spiller Eberhard

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Reflective multilayer coatings for the far uv region

2. Layered synthetic microstructures as Bragg diffractors for X rays and extreme ultraviolet: theory and predicted performance

3. Evaporated Multilayer Dispersion Elements for Soft X-Rays

4. Layered synthetic microstructure technology considerations for the extreme ultraviolet

5. Enhancement of diffraction grating efficiencies in the soft x-ray region by a multilayer coating

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