Cross-sectional shape evaluation of a particle by scatterometry

Author:

Hoshino Tetsuya,Itoh Masahide

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Practical Flow Cytometry;Shapiro,2003

2. G.W. Gee, D. OR, Particle-size analysis, in: A. Klute, (Ed), Methods of soil analysis. Part 1. Physical and mineralogical methods., 2nd Edition, American Society of Agronomy, Inc., Madison, 1986, Ch.2.4, pp. 255–278

3. Particle counting in semiconductor processing gas and apparatus with a new flow-cell-type laser particle counter;Ichijo;Jpn. J. Appl. Phys.,1990

4. Uncertainty characterization of particle depth measurement using digital in-line holography and the hybrid method;Gao;Opt. Express,2013

5. The Fourier Transform and Its Applications to Optics;Duffieux,1983

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