Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films-Reference-Cited by-同舟云学术

Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films

Published:2018-01 Issue: Volume:94 Page:22-30
ISSN:0924-2031
Container-title:Vibrational Spectroscopy
language:en
Short-container-title:Vibrational Spectroscopy

Author:

Rahman Mohd Azam Abdul,Goh Boon Tong,Chiu Wee Siong,Haw Choon Yian,Mahmood Mohamad Rusop,Khiew Poi Sim,Rahman Saadah Abdul

Funder

Ministry of Education Malaysia

UMRG

High Impact Research Program

HIR-MOHE

Publisher

Elsevier BV

Subject

Spectroscopy

Reference17 articles.

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3. Multiphase structure of hydrogen diluted a-SiC: H deposited by HWCVD;Swain;Mater. Chem. Phys.,2006

4. SiCN nanomechanical resonators for array-based biosensor applications;Guthy;NSTI Nanotechnol.,2010

5. A comparative chemical network study of HWCVD deposited amorphous silicon and carbon based alloys thin films;Swain;J. Alloys Compd.,2014

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