Spatial distribution of the neutral gas temperature in rf and dc magnetron sputter discharges determined by fitting rotational spectra of the N2+ using a two-temperature fit-Reference-Cited by-同舟云学术

Spatial distribution of the neutral gas temperature in rf and dc magnetron sputter discharges determined by fitting rotational spectra of the N2+ using a two-temperature fit

Published:2005-02 Issue:2 Volume:60 Page:253-263
ISSN:0584-8547
Container-title:Spectrochimica Acta Part B: Atomic Spectroscopy
language:en
Short-container-title:Spectrochimica Acta Part B: Atomic Spectroscopy

Author:

Linss V.

Publisher

Elsevier BV

Subject

Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference45 articles.

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5. Evidence for CN in spectroscopic studies of laser-induced plasma during pulsed irradiation of graphite targets in nitrogen and ammonia;Acquaviva;J. Phys., At. Mol. Opt. Phys.,1997

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