A laser plasma X-ray source for the analysis of wafer surfaces by grazing emission X-ray fluorescence spectrometry
Author:
Publisher
Elsevier BV
Subject
Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
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4. Techniques: RXES, HR-XAS, HEROS, GIXRF, and GEXRF;High-Resolution XAS/XES;2014-06-25
5. Scanning-free grazing emission x-ray fluorescence by means of an angular dispersive arrangement with a two-dimensional position-sensitive area detector;Review of Scientific Instruments;2013-12
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