Plasma diagnostics of arc-enhanced glow discharge
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference11 articles.
1. Arc-enhanced glow discharge in vacuum arc machines
2. Advances in cathodic arc technology using electrons extracted from the vacuum arc
3. Ion flux characteristics in arc vapor deposition of TiN
4. Process control by optical emission spectroscopy during growth of a-C: H from a CH4 plasma by plasma-enhanced chemical vapour deposition
5. Langmuir probe plasma diagnostics during TiNx deposition
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