Additional ion bombardment in PVD processes generated by a superimposed pulse bias voltage
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. Superimposed pulse bias voltage used in arc- and sputter-technology;Olbrich,1992
2. Analysis of the electrode products emitted by DC arcs in a vacuum ambient;Davis;J. Appl. Phys.,1969
3. Plasma pulse technique for ion implantation;Conrad,1992
4. Low-energy ion irradiation during film growth for reducing defect densities in epitaxial TiN(100) films deposited by reactive magnetron sputtering;Hultman;J. Appl. Phys.,1987
5. Ion-surface interactions during film deposition;Takagi;J. Vac. Sci. Technol. A,1984
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