A simple model for the prediction of coating thickness uniformity from limited measured data
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference19 articles.
1. Physical Vapour Deposition,1976
2. Handbook of Thin Film Technology;Glang,1970
3. Distribution and Apparent Source Geometry of Electron-Beam-Heated Evaporation Sources
4. Applications of Monte Carlo simulation in the analysis of a sputter‐deposition process
5. Summary Abstract: Analysis of sputter coating uniformity by computer modeling
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