An investigation into the thickness and coating structure uniformity of zirconia films on flat surfaces-Reference-Cited by-同舟云学术

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An investigation into the thickness and coating structure uniformity of zirconia films on flat surfaces

Published:1995-09 Issue: Volume:74-75 Page:147-154
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Young S.J.,James A.S.,Matthews A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference14 articles.

1. Proc. 12th Int. Vacuum Congress, The Hague;Fancey,1992

2. A practical model to enable the prediction of coating thickness variations across a flat surface

3. A simple model for the prediction of coating thickness uniformity from limited measured data

4. A coating thickness uniformity model for physical vapour deposition systems—further validity tests

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Calculation Model for the Film Thickness and Component Uniformity of Twin Co-Sputtering Target System;Advanced Materials Research;2010-08

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