Some metal vapour ionization measurements in plasma beam evaporation systems
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference24 articles.
1. Hard coatings by plasma-assisted PVD technologies: Industrial practice
2. Hot hollow cathode and its applications in vacuum coating: A concise review
3. Deposition of Ti-N compounds by thermionically assisted triode reactive ion plating
4. Recent progress in the study of physically vapour-deposited coatings produced by means of highly ionized plasmas
5. An ion-plating apparatus incorporating a d.c. plasma gun with an LaB6 cathode
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1. Low-pressure, high-density plasma nitriding: mechanisms, technology and results;Surface and Coatings Technology;1998-10
2. Diagnostic of arc discharges for plasma nitriding by optical emission spectroscopy;Surface and Coatings Technology;1998-01
3. New trends on nitriding in low pressure arc discharges studied by optical emission spectroscopy;Surface and Coatings Technology;1996-12
4. Study of the ion energy distribution during physical vapour deposition of TiN;Surface and Coatings Technology;1994-12
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