Comparison of acoustic emission from pointed and spherical indentation of TiN films on silicon and sapphire
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference10 articles.
1. The deposition of thin films by filtered arc evaporation
2. Observations and simple fracture mechanics analysis of indentation fracture delamination of TiN films on silicon
3. The properties of TiN films deposited by filtered arc evaporation
4. Acoustic emission and precision force-displacement observations of spherical indentations into TiN films on silicon
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