Nanoindentation studies of ion implanted silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference14 articles.
1. Surface softening in silicon by ion implantation
2. Changing the surface mechanical properties of silicon and α-Al2O3 by ion implantation
3. The elastic properties of ion-implanted silicon
4. Tribology of Ion Bombarded Silicon for Micromechanical Applications
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