Author:
Schubert J.,Martin M.,Roth R.,Fromm E.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. Proc. 20th Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA.,1993
2. Proc. 20th Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA.,1993
3. Proc. 3rd Int. Conf. on Plasma Surface Engineering, Garmisch Partenkirchen, 1992,1993
4. Target and substrate surface reaction kinetics in magnetron sputtering of nitride coatings
5. Kinetics of nitride formation on titanium targets during reactive sputtering
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