Plasma and deposition enhancement by modified arc evaporation source
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference18 articles.
1. Magnetic enhancement of cathodic arc deposition
2. Review of ion‐based coating processes derived from the cathodic arc
3. Characteristics of titanium arc evaporation processes
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1. Optical emission spectroscopy of vanadium cathodic arc plasma at different nitrogen pressure;Journal of Applied Physics;2023-12-22
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3. Dense and high-stability Ti2AlN MAX phase coatings prepared by the combined cathodic arc/sputter technique;Applied Surface Science;2017-02
4. Effect of Axial Magnetic Field on the Microstructure and Mechanical Properties of CrN Films Deposited by Arc Ion Plating;Acta Metallurgica Sinica (English Letters);2016-04-20
5. Effect of Axial Magnetic Field on the Microstructure, Hardness and Wear Resistance of TiN Films Deposited by Arc Ion Plating;Acta Metallurgica Sinica (English Letters);2015-06-25
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