Macroparticle-free TiN films prepared by arc ion-plating process
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference19 articles.
1. Fast deposition of metallurgical coatings and production of surface alloys using a pulsed high current vacuum arc
2. Ion-assisted thin film deposition and applications
3. Cathodic arc deposition technology
4. Ion flux characteristics in arc vapor deposition of TiN
5. Components of cathode erosion in vacuum arcs
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1. Effects of arc current and bias voltage on properties of AlCrN coatings by arc ion plating with large target;Materials Research Express;2019-11-08
2. Coupled Magnetic Field Enhanced Arc Ion Plating: Process, Plasma and Deposited Film;Advanced Materials Research;2011-11
3. Comparison of the Effects of Bias Voltage and Transverse Magnetic Field on the Macro-Particles Distribution on the Surface of TiN Films Prepared by Arc Ion Plating;Advanced Materials Research;2011-09
4. INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING;ACTA METALL SIN;2011
5. PREPARATION OF (Ti, Al)N/Ti2AlN COATINGS;ACTA METALLURGICA SINICA;2010-07-15
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