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Fringe field effects on electrostatic deflection of electrons by a pair of charged plates

  • Published:2018-08 Issue: Volume:94 Page:73-79
  • ISSN:0304-3886
  • Container-title:Journal of Electrostatics
  • language:en
  • Short-container-title:Journal of Electrostatics

Author:

Souto Chelsie L.,Carll Curtis G.,Wang Jian-Qing

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Biotechnology,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Minimization of fringing field effects in the parallel plate electrostatic spectrograph;Proca;Rev. Sci. Instrum.,1973

2. A study of miniaturized electrostatic octupole deflectors;Liu;Nucl. Instrum. Meth. Phys. Res.,1995

3. Optmization of e-beam sytstems for wafer defect inspection and for die-to-database verification;Kazmiruk;ECS Transactions,2009

4. Consideration of Arrayed E-Beam Microcolumn Based Systems Potentialities for Wafer Defects Inspection;Kazmiruk,2008

5. Computer simulations of submicron FIB system optics;Thompson;J. Vac. Sci. Technol. B,1983

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2. Fringe fields of deflector plates with two earthed screens;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2023-06

3. Edge fields of flat capacitor with two earthed screens;PROCEEDINGS OF THE II INTERNATIONAL CONFERENCE ON ADVANCES IN MATERIALS, SYSTEMS AND TECHNOLOGIES: (CAMSTech-II 2021);2022

4. Analytical analysis and simulation on fringe field effect of deflector plates applied in ultrafast electron microscopy;Micron;2019-11
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