Performance evaluation of a water mist system in semiconductor wet bench fires

Author:

Chang Wen-Yao,Fu Ping-Kun,Chen Chiun-Hsun,Shu Yi-Liang

Publisher

Elsevier BV

Subject

Safety, Risk, Reliability and Quality,General Chemical Engineering,Environmental Chemistry,Environmental Engineering

Reference11 articles.

1. The Mechanisms of Extinguishment of Fire by Finely Divided Water;Braidech,1955

2. Chemical hazards in the semiconductor industry;Chelton;IEEE Trans Educ,1991

3. Fire protection of flammable work stations in the clean room environment of a microelectronic fabrication facility;Fisher;Fire Technol,1986

4. FM 5560, 2005, Approval Standard for Water Mist Systems, 2005 ed. (FM Global Technologies LLC).

5. FM Global Loss Prevention Data Sheet 7-7, 2003, Semiconductor Fabrication Facilities.

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