Integrated electroless metallization for ULSI
Author:
Publisher
Elsevier BV
Subject
Electrochemistry,General Chemical Engineering
Reference18 articles.
1. ULSI scaling: an interconnect technology;Kikkawa,1998
2. Electroless copper deposition for ULSI
3. Copper electroless deposition technology for ultra-large-scale-integration (ULSI) metallization
4. Selective and Blanket Electroless Copper Deposition for Ultralarge Scale Integration
5. Proceedings of the Fall MRS Meeting, Boston, 2–5 December;Lopatin,1996
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