Electrochemical micro/nano-machining: principles and practices-Reference-Cited by-同舟云学术

Electrochemical micro/nano-machining: principles and practices

Published:2017 Issue:5 Volume:46 Page:1526-1544
ISSN:0306-0012
Container-title:Chemical Society Reviews
language:en
Short-container-title:Chem. Soc. Rev.

Author:

Zhan Dongping¹²³⁴⁵^ORCID,Han Lianhuan¹²³⁴⁵,Zhang Jie¹²³⁴⁵,He Quanfeng¹²³⁴⁵,Tian Zhao-Wu¹²³⁴⁵,Tian Zhong-Qun¹²³⁴⁵

Affiliation:

1. State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS)

2. Collaborative Innovation Centre of Chemistry for Energy Materials (iChEM), and Department of Chemistry

3. College of Chemistry and Chemical Engineering

4. Xiamen University

5. Xiamen 361005

Abstract

Micro/nano-machining (MNM) is becoming the cutting-edge of high-tech manufacturing because of the ever increasing industrial demands for super smooth surfaces and functional three-dimensional micro/nano-structures in miniaturized and integrate devices, and electrochemistry plays an irreplaceable role in MNM.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2017/CS/C6CS00735J

Reference216 articles.

1. H. Park and M.Kraatz, et al., Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications, Springer, New York, 2009, pp. 100–103

2. The Future of Integrated Circuits: A Survey of Nanoelectronics

3. Moore's law: the future of Si microelectronics

4. S. E. Lyshevski , MEMS and NEMS: systems, devices, and structures, CRC press, 2002

5. Micro Total Analysis Systems. 1. Introduction, Theory, and Technology

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