Silicon Nitride (Si3N4) (Noncrystalline)
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Publisher
Elsevier
Reference25 articles.
1. Preparation and Properties of Pyrolytic Silicon Nitride
2. Some Properties of Vapor Deposited Silicon Nitride Films Using the SiH[sub 4]-NH[sub 3]-H[sub 2] System
3. The Preparation and Properties of Amorphous Silicon Nitride Films
4. Property Changes in Pyrolytic Silicon Nitride with Reactant Composition Changes
5. Properties of Si[sub x]O[sub y]N[sub z] Films on Si
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