Synthesis and characterization of hafnium oxide films for thermo and photoluminescence applications
Author:
Publisher
Elsevier BV
Subject
Radiation
Reference21 articles.
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2. Chemical vapor deposition and characterization of HfO2 films from organo-hafnium compounds;Balog;Thin Solid Films,1977
3. Physical characterization of hafnium oxide thin films and their applications as gas sensing devices;Capone;J. Vac. Sci. Technol. A,1998
4. Influence of the sintering process of ZrO2 pellets on thermoluminecence induced by ultraviolet radiation;Chang;Radiat. Prot. Dosimetry,1993
5. Spectroscopic ellipsometry characterization of high-k dielectric HfO2 thin films and the high-temperature annealing effects on their optical properties;Cho;Appl. Phys. Lett.,2002
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