Subject
Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference44 articles.
1. CMOS compatible fabrication processes for the digital micromirror device;Gong;IEEE J. Electron Devices Soc.,2014
2. CMOS MEMS fabrication technologies and devices;Qu;Micromachines,2016
3. Growth of SnO2 films on micromachined hotplates;Cavicchi;Appl. Phys. Lett.,1995
4. Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring Semiconductor Gas Sensors;Binions,2013
5. Studying the effect of deposition conditions on the performance and reliability of MEMS gas sensors;Sadek;Sensors,2007
Cited by
36 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献