Humidity sensing characteristics of Ga-doped zinc oxide film grown on a polycrystalline AlN thin film based on a surface acoustic wave

Author:

Hong Hoang-Si,Chung Gwiy-Sang

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. A high sensitivity nanomaterial based SAW humidity sensor;Wu;J. Phys. D: Appl. Phys.,2008

2. A novel wireless, passive CO2 sensor incorporating a surface acoustic wave reflective delay line;Wang;Smart Mater. Strut.,2007

3. Sensitivity of a platinum-polyyne-based sensor to low relative humidity and chemical vapors;Caliendo;Appl. Phys. Lett.,2002

4. Subsecond-response SAW humidity sensor with porphyrin nanostructure deposited on bare and metallised piezoelectric substrate;Rimeika;Electron. Lett.,2007

5. Impact of ambient humidity on surface wave attenuation and velocity in hematoporphyrin-on-LiNbO3 structure;Rimeika;Ultragarsas (Ultrasound),2008

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