Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer-Reference-Cited by-同舟云学术

Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer

Published:2024 Issue:21 Volume:16 Page:10230-10238
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Luo Zhifang¹²³⁴⁵^ORCID,Li Dongxiao⁴⁵,Le Xianhao⁴⁵,He Tianyiyi⁴⁵,Shao Shuai¹²³,Lv Qiaoya⁴⁵,Liu Zhaojun⁴⁵,Lee Chengkuo⁴⁵^ORCID,Wu Tao¹²³

Affiliation:

1. School of Information Science and Technology, Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, ShanghaiTech University, China

2. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China

3. University of Chinese Academy of Sciences, China

4. Department of Electrical & Computer Engineering, National University of Singapore, Singapore

5. Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore

Abstract

We propose an ultra-compact AlScN Lamb Wave humidity sensor, which utilizes a suspended structure and an AlScN thin film to improve the sensing performance.

Funder

Natural Science Foundation of Shanghai

Jiangsu Provincial Key Research and Development Program

Publisher

Royal Society of Chemistry (RSC)

Link

http://pubs.rsc.org/en/content/articlepdf/2024/NR/D3NR05684H

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