Highly integrated COP monolithic membrane microvalves by robust hot embossing-Reference-Cited by-同舟云学术

Highly integrated COP monolithic membrane microvalves by robust hot embossing

Published:2014-01 Issue: Volume:190 Page:451-458
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Etxebarria Jaione,Berganzo Javier,Elizalde Jorge,Fernández Luis José,Ezkerra Aitor

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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