Gas sensing using embedded piezoresistive microcantilever sensors-Reference-Cited by-同舟云学术

Gas sensing using embedded piezoresistive microcantilever sensors

Published:2004-05 Issue:2-3 Volume:99 Page:474-479
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Kooser A.,Gunter R.L.,Delinger W.D.,Porter T.L.,Eastman M.P.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

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5. A chemical sensor based on a micromachined cantilever array for the identification of gases and vapors;Lang;Appl. Phys. A,1998

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