Thickness effects of aerosol deposited hygroscopic films on ultra-sensitive humidity sensors-Reference-Cited by-同舟云学术

Thickness effects of aerosol deposited hygroscopic films on ultra-sensitive humidity sensors

Published:2018-07 Issue: Volume:265 Page:632-643
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Liang Jun-Ge^ORCID,Kim Eun-Seong,Wang Cong,Cho Myung-Yeon,Oh Jong-Min,Kim Nam-Young

Funder

Korea government

Korean government

Commercializations Promotion Agency for R&D Outcomes

Kwangwoon University

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference27 articles.

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3. Room temperature fabrication of MIMCAPs via aerosol deposition;Wang;IEEE Electron Device Lett.,2016

4. Effects of starting powder and thermal treatment on the aerosol deposited BaTiO3 thin films toward less leakage currents;Yao;Nanoscale Res. Lett.,2014

5. Growth of dense Ti3SiC2 MAX phase films elaborated at room temperature by aerosol deposition method;Piechowiak;J. Eur. Ceram. Soc.,2014

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