Thin film micro carbon dioxide sensor using MEMS process-Reference-Cited by-同舟云学术

Thin film micro carbon dioxide sensor using MEMS process

Published:2004-09 Issue:1 Volume:102 Page:20-26
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Bang Yeung-Il,Song Kap-Duk,Joo Byung-Su,Huh Jeung-Soo,Choi Soon-Don,Lee Duk-Dong

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

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4. NASICON Structure for alkaline ion recognition;Cretin;Sens. Actuators B,1997

5. Electrochemical vapor deposition of stabilized zirconia and interconnection materials for solid oxide fuel cells;Schoonman;Solid State Ionics,1991

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