A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating-Reference-Cited by-同舟云学术

A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating

Published:2010-08 Issue:1 Volume:149 Page:136-142
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Wang Yun,Park Seungwoo,Yeow John T.W.,Langner Andreas,Müller Frank

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Fuel cells, an alternative sources of energy;Boudghene Stambouli;Renew. Sust. Energy Rev.,2002

2. Operation of a proton-exchange membrane fuel cell under non-humidified conditions using thin cast Nafion membranes with different gas-diffusion media;Vengatesan;J. Power Sources,2006

3. Anodic nano-porous humidity sensing thin films for the commercial and industrial applications;Michael;IEEE IAS,2004

4. Adsorption in an ordered and non-interconnected mesoporous material: single crystal porous silicon;Coasne;Phys. Chem. Chem. Phys.,2001

5. CMOS-compatible fabrication of porous silicon gas sensors and their readout electronics on the same chip;Barillaro;Phys. Status Solidi A,2007

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