Resonant Silicon Microcantilevers for Particle and Gas Sensing
Author:
Publisher
Springer Berlin Heidelberg
Link
https://link.springer.com/content/pdf/10.1007/5346_2023_33
Reference132 articles.
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3. Ezrre S, Reyna MA, Anguiano C et al (2022) Lab-on-a-chip platforms for airborne particulate matter applications: a review of current perspectives. Biosensors 12. https://doi.org/10.3390/bios12040191
4. Muñoz-Galán H, Alemán C, Pérez-Madrigal MM (2023) Beyond biology: alternative uses of cantilever-based technologies. Lab Chip. https://doi.org/10.1039/d2lc00873d
5. Pachkawade V, Tse Z (2022) MEMS sensor for detection and measurement of ultra-fine particles. Eng Res Express 4. https://doi.org/10.1088/2631-8695/ac743a
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