Composite porous silicon-crystalline silicon cantilevers for enhanced biosensing

Author:

Stolyarova S.,Cherian S.,Raiteri R.,Zeravik J.,Skladal P.,Nemirovsky Y.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference35 articles.

1. Cantilever transducers as a platform for chemical and biological sensors;Lavrik;Rev. Sci. Instr.,2004

2. Micromechanical cantilever-based biosensors;Raiteri;Sensor. Actuator.,2001

3. Influence of surface stress on the resonance behavior of microcantilevers;McFarland;APL,2005

4. Infrared vision using uncooled micro-optomechanical camera;Perazzo;APL,1999

5. Ultrasensitive mass sensing using mode localization in coupled microcantilevers;Spletzer;APL,2006

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