Porous Silicon Functionalities for BioMEMS
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-71381-6_80
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5. Bhansali S, Thurman Henderson H, Hoath SB (2002) Probing human skin as an information-rich smart biological interface using MEMS sensors. Microelectron J 33(1–2):121–127
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