Growth of nitrogen-doped SiC boules by halide chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference8 articles.
1. Thermodynamic analysis of phase transformations at the dissociative evaporation of silicon carbide polytypes
2. Study of the concentration distribution of SiC vapour in the crystal growth zone
3. Nonuniformities of electrical resistivity in undoped 6H-SiC wafers
4. Bulk growth of high-purity 6H-SiC single crystals by halide chemical-vapor deposition
5. Analysis of products of high-temperature pyrolysis of various hydrocarbons
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