Crystalline phases, microstructures and electrical properties of hafnium oxide films deposited by sol–gel method-Reference-Cited by-同舟云学术

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Crystalline phases, microstructures and electrical properties of hafnium oxide films deposited by sol–gel method

Published:2005-08 Issue:2-4 Volume:281 Page:452-457
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Wang Zhan Jie,Kumagai Toshihide,Kokawa Hiroyuki,Tsuaur Jiunnjye,Ichiki Masaaki,Maeda Ryutaro

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference20 articles.

1. Optical coatings deposited by reactive ion plating

2. Study of HfO2 films prepared by ion-assisted deposition using a gridless end-hall ion source

3. Optical characterization of HfO2 thin films grown by atomic layer deposition

4. High-κ gate dielectrics: Current status and materials properties considerations

5. Chemical vapor deposition of HfO2 films on Si(100)

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1. Effects of La Doping on Local Structure of Hafnium Oxide Studied by X-Ray Absorption Spectroscopy;Integrated Ferroelectrics;2023-09-29

2. Crystallographic structure and ferroelectricity of epitaxial hafnium oxide thin films;Journal of the Korean Ceramic Society;2021-12-07

3. Scintillation Liquids Loaded with Hafnium Oxide Nanoparticles for Spectral Resolution of γ Rays;ACS Applied Nano Materials;2021-02-09

4. Bipolar Cu/HfO2/p++ Si Memristors by Sol-Gel Spin Coating Method and Their Application to Environmental Sensing;Scientific Reports;2019-07-10

5. Comparision of in situ spectroscopic ellipsometer and ex situ x-ray photoelectron spectroscopy depth profiling analysis of HfO2/Hf/Si multilayer structure;Materials Research Express;2018-08-15

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