Crystallographic structure and ferroelectricity of epitaxial hafnium oxide thin films
Author:
Funder
National Research Foundation of Korea
Gachon University
Publisher
Springer Science and Business Media LLC
Subject
Ceramics and Composites
Link
https://link.springer.com/content/pdf/10.1007/s43207-021-00171-z.pdf
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5. M. Trentzsch, S. Flachowsky, R. Richter, J. Paul, B. Reimer, D. Utess, S. Jansen, H. Mulaosmanovic, S. Müller and S. Slesazeck: A 28nm HKMG super low power embedded NVM technology based on ferroelectric FETs, in 2016 IEEE International Electron Devices Meeting (IEDM), (IEEE, City, 2016), pp. 11.5. 1.
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